<Abstract>

Precision metrology is an important discipline in precision engineering and nanotechnology. It is the science and technology of measurement for quantifying physical quantities derived from the SI base quantities of length and time, including geometrical properties of an object such as length, angle and surface topography, as well as kinematic properties such as displacement, velocity and acceleration. Such a measurement is essential to support the innovations in science and technology as well as the activities in manufacturing industries. This plenary speech will present cutting-edge technologies of precision metrology based on ultrashort pulse laser. In the first part of the speech, an explanation of the unique characteristics and functions of ultrashort pulse laser in time-domain as ultrashort optical pulses, and those in frequency domain as optical frequency comb will be explained. Optical sensors and measuring instruments taking use of such characteristics and functions, such as absolute distance sensors, nonlinear optical microscopes, and optical coherence tomography, will be highlighted. In the second part of the speech, the related sensor technologies developed in Tohoku University will be presented.